Wafer Fused Silica Ø100mm Ep.0.5mm flat
Material : Corning 7980 UV Grade Fused Silica equivalent to 2G quality,
Dimensions : 100.0mm +/- .2mm diameter x .5mm +/- .025mm thick
3.93'' +/-.00787'' diameter x .0197'' +/- .00098'' thick,
With reference flat measuring 32.5+/-2.5mm(=1.27'' +/- .098'') long
polished both sides 40/20 scratch/dig,
non-effective area 3mm border, 80/50,
TTV = <10 microns,
edges 22 degrees blended edge profile,
packaging class 100 clean room inspection, in plastic containers.