Wafer Fused Silica Ø76.2mm Ep.1.0mm flat
Material : Corning 7980 UV Grade Fused Silica equivalent to 2G quality,
Dimensions : 76.2mm +/- .2mm diameter x 1mm +/- .025mm thick
3'' +/-.00787'' diameter x .0393'' +/- .00098'' thick,
With reference flat measuring 22.225mm +/-3.175mm (=.875'' +/- .125'') long
polished both sides 40/20 scratch/dig,
non-effective area 3mm border, 80/50,
TTV = <10 microns,
edges 22 degrees blended edge profile,
packaging class 100 clean room inspection, in plastic containers.